التفاصيل البيبلوغرافية
| العنوان: |
Analysis of the Spread of Harmful Impurities in the Atmosphere from Microelectronic Facilities |
| المؤلفون: |
Gundartcev, Mikhail A., Riabyshenkov, Andrei S., Gundartcev, Andrei A., Sharaeva, Valeria, Karakeyan, Valery I. |
| المصدر: |
2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus) Electrical and Electronic Engineering (ElConRus), 2021 IEEE Conference of Russian Young Researchers in. :2999-2802 Jan, 2021 |
| Relation: |
2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
Full Text Finder