التفاصيل البيبلوغرافية
| العنوان: |
A defect characterization technique for the sidewall surface of Nano-ridge and Nanowire based Logic and RF technologies |
| المؤلفون: |
Vais, A., Hsu, B., Syshchyk, O., Yu, H., Alian, A., Mols, Y., Kodandarama, K. V., Kunert, B., Waldron, N., Simoen, E., Collaert, N. |
| المصدر: |
2021 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2021 IEEE International. :1-5 Mar, 2021 |
| Relation: |
2021 IEEE International Reliability Physics Symposium (IRPS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
Full Text Finder