Reliability of Wafer-Level Ultra-Thinning down to 3 µm using 20 nm-Node DRAMs

التفاصيل البيبلوغرافية
العنوان: Reliability of Wafer-Level Ultra-Thinning down to 3 µm using 20 nm-Node DRAMs
المؤلفون: Chen, Zhwen, Kim, Youngsuk, Fukuda, Tadashi, Sakui, Koji, Ohba, Takayuki, Kobayashi, Tatsuji, Obara, Takashi
المصدر: 2021 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2021 IEEE International. :1-6 Mar, 2021
Relation: 2021 IEEE International Reliability Physics Symposium (IRPS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728168937
تدمد:19381891
DOI:10.1109/IRPS46558.2021.9405125