Strategy to Characterize Electromigration Short Length Effects in Cu/low-k Interconnects

التفاصيل البيبلوغرافية
العنوان: Strategy to Characterize Electromigration Short Length Effects in Cu/low-k Interconnects
المؤلفون: Zhang, Z., Kraatz, M., Hauschildt, M., Choi, S., Clausner, A., Zschech, E., Gall, M.
المصدر: 2021 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2021 IEEE International. :1-5 Mar, 2021
Relation: 2021 IEEE International Reliability Physics Symposium (IRPS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728168937
تدمد:19381891
DOI:10.1109/IRPS46558.2021.9405161