مؤتمر
Development of HSQ replacement gate process for silicon nanowire MOS devices
| العنوان: | Development of HSQ replacement gate process for silicon nanowire MOS devices |
|---|---|
| المؤلفون: | Tu, Kun, Dong, Xiaoqiao, Zhang, Baotong, Huang, Ru, Li, Ming, Lu, Peimin |
| المصدر: | 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2021 5th IEEE. :1-3 Apr, 2021 |
| Relation: | 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781728181769 |
|---|---|
| DOI: | 10.1109/EDTM50988.2021.9421017 |