Residual stresses in the electrode of Pt/Ti for the thermal detector with thin-film structure

التفاصيل البيبلوغرافية
العنوان: Residual stresses in the electrode of Pt/Ti for the thermal detector with thin-film structure
المؤلفون: Kibeom Kim, Mina Yoo, Sangil Lee, Dohoon Kim, Seongho Bae, Moonho Lee
المصدر: ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076) Applications of ferroelectrics Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on. 2:929-932 vol. 2 2000
Relation: ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780359402
9780780359406
تدمد:10994734
DOI:10.1109/ISAF.2000.942470