دورية أكاديمية
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators
| العنوان: | Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators |
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| المؤلفون: | Pandit, M., Mustafazade, A., Sobreviela, G., Zhao, C., Zou, X., Seshia, A.A. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 30(4):500-505 Aug, 2021 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2021.3077633 |