التفاصيل البيبلوغرافية
| العنوان: |
Structural and Objective Model for Providing a Given Class of Clean Rooms for Microelectronics |
| المؤلفون: |
Karakeyan, Valery I., Riabyshenkov, Andrei S., Gundartcev, Mikhail A., Sharaeva, Valeria P., Kharlamov, Nikolai R. |
| المصدر: |
2021 International Seminar on Electron Devices Design and Production (SED) Electron Devices Design and Production (SED), 2021 International Seminar on. :1-4 Apr, 2021 |
| Relation: |
2021 International Seminar on Electron Devices Design and Production (SED) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
