التفاصيل البيبلوغرافية
| العنوان: |
Characterization of an Asymmetrical Capacitive MEMS Tilt Sensor |
| المؤلفون: |
Gao, Y., Zhang, X., Qi, Y., Zhang, H., Ryutaro, M., Jiang, Z., Wei, X. |
| المصدر: |
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2021 IEEE 16th International Conference on. :1660-1663 Apr, 2021 |
| Relation: |
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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