التفاصيل البيبلوغرافية
| العنوان: |
Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle |
| المؤلفون: |
Sun, Changhe, Li, Bolun, Su, Wenqu, Liu, Yufei, Wu, Yaming |
| المصدر: |
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2021 IEEE 16th International Conference on. :704-708 Apr, 2021 |
| Relation: |
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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