التفاصيل البيبلوغرافية
العنوان: |
Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle |
المؤلفون: |
Sun, Changhe, Li, Bolun, Su, Wenqu, Liu, Yufei, Wu, Yaming |
المصدر: |
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2021 IEEE 16th International Conference on. :704-708 Apr, 2021 |
Relation: |
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |