Optical Measurement of the Dynamic Response of an Electrothermal Microactuator

التفاصيل البيبلوغرافية
العنوان: Optical Measurement of the Dynamic Response of an Electrothermal Microactuator
المؤلفون: Chen, Hao, Wang, Xinjie, Xi, Zhanwen, Wang, Jiong, Nie, Weirong
المصدر: 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2021 IEEE 16th International Conference on. :1358-1361 Apr, 2021
Relation: 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665419413
تدمد:24743755
DOI:10.1109/NEMS51815.2021.9451369