التفاصيل البيبلوغرافية
| العنوان: |
Stochastic analysis of the elctrothermal microactuator with fabrication error |
| المؤلفون: |
Liu, Haotian, Chen, Hao, Cao, Yun, Nie, Weirong, Xi, Zhanwen, Lei, Shenghong |
| المصدر: |
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2021 IEEE 16th International Conference on. :1287-1290 Apr, 2021 |
| Relation: |
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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