مؤتمر
Exploring Gate-Cut Patterning Approaches Using Simulation and Defect Modelling
| العنوان: | Exploring Gate-Cut Patterning Approaches Using Simulation and Defect Modelling |
|---|---|
| المؤلفون: | Fei, Sun Li, Peng, Wang Qing, Hong, Zhang Ji, Shan, Chi Yu |
| المصدر: | 2021 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2021 China. :1-4 Mar, 2021 |
| Relation: | 2021 China Semiconductor Technology International Conference (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781665449458 9781665449441 |
|---|---|
| DOI: | 10.1109/CSTIC52283.2021.9461509 |