دورية أكاديمية
Study on Measurement Method of Microscopic ζ Potential
| العنوان: | Study on Measurement Method of Microscopic ζ Potential |
|---|---|
| المؤلفون: | Watanabe, Y., Ikawa, H., Suzuki, S., Isobe, T., Hirano, T., Sugai, K. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 34(3):312-316 Aug, 2021 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
|---|---|
| DOI: | 10.1109/TSM.2021.3095965 |