Effect of RF Sputtering Power Density and Post Thermal Annealing Temperature on the Performance of Aluminium-Doped Zinc Oxide Thin-Film Transistor

التفاصيل البيبلوغرافية
العنوان: Effect of RF Sputtering Power Density and Post Thermal Annealing Temperature on the Performance of Aluminium-Doped Zinc Oxide Thin-Film Transistor
المؤلفون: Huang, Jinyang, Zhang, Meng, Yang, Yuyang, Zhang, Xincheng, Zeng, Yuhuang, Chen, Zhiying, Yan, Yan, Liou, Juin Jei
المصدر: 2021 9th International Symposium on Next Generation Electronics (ISNE) Next Generation Electronics (ISNE), 2021 9th International Symposium on. :1-4 Jul, 2021
Relation: 2021 9th International Symposium on Next Generation Electronics (ISNE)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728162584
تدمد:23788607
DOI:10.1109/ISNE48910.2021.9493649