التفاصيل البيبلوغرافية
| العنوان: |
Fine Patterning on 3D Sample with Curvature and Depth Using Resist Sheet with Latent Image |
| المؤلفون: |
Kuroyanagi, Takayuki, Saito, Shigenori, Sasaki, Minoru |
| المصدر: |
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) SSolid-State Sensors, Actuators and Microsystems (Transducers), 2021 21st International Conference on. :521-524 Jun, 2021 |
| Relation: |
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
