Area-Selective MOCVD Synthesis of VO2(B) and VO2(M) Phases on a Si Substrate

التفاصيل البيبلوغرافية
العنوان: Area-Selective MOCVD Synthesis of VO2(B) and VO2(M) Phases on a Si Substrate
المؤلفون: Lysenko, Nikita I., Mutilin, Sergey V., Prinz, Victor Ya., Yakovkina, Lyubov V., Kichay, Vadim N., Shayapov, Vladimir R.
المصدر: 2021 IEEE 22nd International Conference of Young Professionals in Electron Devices and Materials (EDM) Young Professionals in Electron Devices and Materials (EDM), 2021 IEEE 22nd International Conference of. :79-82 Jun, 2021
Relation: 2021 IEEE 22nd International Conference of Young Professionals in Electron Devices and Materials (EDM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665414982
تدمد:2325419X
DOI:10.1109/EDM52169.2021.9507670