Development of Advanced Silicon 3D Sensors at FBK Using Stepper Lithography

التفاصيل البيبلوغرافية
العنوان: Development of Advanced Silicon 3D Sensors at FBK Using Stepper Lithography
المؤلفون: Boscardin, Maurizio, Ficorella, Francesco, Ronchin, Sabina, Ferrari, Sara, Mendicino, Roberto, Lai, Adriano, Meschini, Marco, Abdulla Samy, Md. Arif, Betta, Gian-Franco Dalla
المصدر: 2020 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC) Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC), 2020 IEEE. :1-3 Oct, 2020
Relation: 2020 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728176932
تدمد:25770829
DOI:10.1109/NSS/MIC42677.2020.9508081