التفاصيل البيبلوغرافية
العنوان: |
The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach |
المؤلفون: |
Hoogesteger, M.M., Sadeghian, H., Nijmeijer, H. |
المصدر: |
2021 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) Advanced Intelligent Mechatronics (AIM), 2021 IEEE/ASME International Conference on. :110-115 Jul, 2021 |
Relation: |
2021 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) |
قاعدة البيانات: |
IEEE Xplore Digital Library |