The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach

التفاصيل البيبلوغرافية
العنوان:	The Sensitivity of Subsurface Contact Resonance Atomic Force Microscopy to Changes in the Depth of Buried Features: a Nonlinear Approach
المؤلفون:	Hoogesteger, M.M., Sadeghian, H., Nijmeijer, H.
المصدر:	2021 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) Advanced Intelligent Mechatronics (AIM), 2021 IEEE/ASME International Conference on. :110-115 Jul, 2021
Relation:	2021 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
قاعدة البيانات:	IEEE Xplore Digital Library