مؤتمر
Microstructural Optimization of Tungsten for Low Resistivity Using Ion Beam Deposition
| العنوان: | Microstructural Optimization of Tungsten for Low Resistivity Using Ion Beam Deposition |
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| المؤلفون: | Cerio, Frank, Mehta, Rutvik J, Turner, Paul, Kim, Jinho, Caldwell, Robert |
| المصدر: | 2021 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2021 IEEE International. :1-3 Jul, 2021 |
| Relation: | 2021 IEEE International Interconnect Technology Conference (IITC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781728176321 |
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| تدمد: | 23806338 |
| DOI: | 10.1109/IITC51362.2021.9537501 |