Laser nanofabrication deep inside silicon wafers

التفاصيل البيبلوغرافية
العنوان: Laser nanofabrication deep inside silicon wafers
المؤلفون: Sabet, Rana Asgari, Ishraq, Aqiq, Tokel, Onur
المصدر: 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), 2021 Conference on. :1-1 Jun, 2021
Relation: 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665418768
DOI:10.1109/CLEO/Europe-EQEC52157.2021.9542673