دورية أكاديمية
Low-Loss Hydrogen-Free SiNx Optical Waveguide Deposited by Reactive Sputtering on a Bulk Si Platform
| العنوان: | Low-Loss Hydrogen-Free SiNx Optical Waveguide Deposited by Reactive Sputtering on a Bulk Si Platform |
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| المؤلفون: | Tsuchiya, R., Oyamada, R., Fukushima, T., Piedra-Lorenzana, J.A., Hizawa, T., Nakai, T., Ishikawa, Y. |
| المصدر: | IEEE Journal of Selected Topics in Quantum Electronics IEEE J. Select. Topics Quantum Electron. Selected Topics in Quantum Electronics, IEEE Journal of. 28(3: Hybrid Integration for Silicon Photonics):1-9 Jun, 2022 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 1077260X 15584542 |
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| DOI: | 10.1109/JSTQE.2021.3115507 |