مؤتمر
Virtual metrology for semiconductor manufacturing: Focus on transfer learning
| العنوان: | Virtual metrology for semiconductor manufacturing: Focus on transfer learning |
|---|---|
| المؤلفون: | Clain, Rebecca, Borodin, Valeria, Juge, Michel, Roussy, Agnes |
| المصدر: | 2021 IEEE 17th International Conference on Automation Science and Engineering (CASE) Automation Science and Engineering (CASE), 2021 IEEE 17th International Conference on. :1621-1626 Aug, 2021 |
| Relation: | 2021 IEEE 17th International Conference on Automation Science and Engineering (CASE) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781665418737 9781665418720 |
|---|---|
| تدمد: | 21618089 |
| DOI: | 10.1109/CASE49439.2021.9551567 |