مؤتمر
Effect of implant dose and energy on formation of thin SOI structure in SIMOX using water plasma
| العنوان: | Effect of implant dose and energy on formation of thin SOI structure in SIMOX using water plasma |
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| المؤلفون: | Jing Chen, Meng Chen, Xiang Wang, Yemin Dong, Zhihong Zheng, Xi Wang |
| المصدر: | 2001 IEEE International SOI Conference. Proceedings (Cat. No.01CH37207) SOI conference SOI Conference, 2001 IEEE International. :43-44 2001 |
| Relation: | 2001 IEEE International SOI Conference. Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780367391 9780780367395 |
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| تدمد: | 1078621X |
| DOI: | 10.1109/SOIC.2001.957976 |