Study on The Theory and Model of Overcut Effect of Focused Ion Beam Etching Process

التفاصيل البيبلوغرافية
العنوان: Study on The Theory and Model of Overcut Effect of Focused Ion Beam Etching Process
المؤلفون: Liu, Haoyang, Han, Tian, Fang, Chen, Xing, Yan
المصدر: 2021 IEEE 5th Information Technology,Networking,Electronic and Automation Control Conference (ITNEC) Information Technology,Networking,Electronic and Automation Control Conference (ITNEC), 2021 IEEE 5th. 5:1105-1108 Oct, 2021
Relation: 2021 IEEE 5th Information Technology,Networking,Electronic and Automation Control Conference (ITNEC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665415996
تدمد:26933128
DOI:10.1109/ITNEC52019.2021.9587320