التفاصيل البيبلوغرافية
العنوان: |
Study on The Theory and Model of Overcut Effect of Focused Ion Beam Etching Process |
المؤلفون: |
Liu, Haoyang, Han, Tian, Fang, Chen, Xing, Yan |
المصدر: |
2021 IEEE 5th Information Technology,Networking,Electronic and Automation Control Conference (ITNEC) Information Technology,Networking,Electronic and Automation Control Conference (ITNEC), 2021 IEEE 5th. 5:1105-1108 Oct, 2021 |
Relation: |
2021 IEEE 5th Information Technology,Networking,Electronic and Automation Control Conference (ITNEC) |
قاعدة البيانات: |
IEEE Xplore Digital Library |