مؤتمر
A Versatile, Low-Cost UV Exposure System for Photolithography
| العنوان: | A Versatile, Low-Cost UV Exposure System for Photolithography |
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| المؤلفون: | K M, Dhivakar, Sarje, Anshu |
| المصدر: | 2021 Smart Technologies, Communication and Robotics (STCR) Smart Technologies, Communication and Robotics (STCR), 2021. :1-5 Oct, 2021 |
| Relation: | 2021 Smart Technologies, Communication and Robotics (STCR) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781665418065 |
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| DOI: | 10.1109/STCR51658.2021.9588848 |