Nanosheet Width Investigation for Gate-All-Around Devices Targeting SRAM Application

التفاصيل البيبلوغرافية
العنوان: Nanosheet Width Investigation for Gate-All-Around Devices Targeting SRAM Application
المؤلفون: Pal, Ashish, Bazizi, El Mehdi, Colombeau, Benjamin, Alexander, Blessy, Ayyagari-Sangamalli, Buvna
المصدر: 2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) Simulation of Semiconductor Processes and Devices (SISPAD), 2021 International Conference on. :19-22 Sep, 2021
Relation: 2021 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665406857
تدمد:19461577
DOI:10.1109/SISPAD54002.2021.9592579