التفاصيل البيبلوغرافية
| العنوان: |
Surface preparation of metal films by gas cluster ion beams using organic acid vapor for wafer bonding |
| المؤلفون: |
Hanahara, S., Toyoda, N. |
| المصدر: |
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2021 7th International Workshop on. :7-7 Oct, 2021 |
| Relation: |
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
