التفاصيل البيبلوغرافية
العنوان: |
Surface preparation of metal films by gas cluster ion beams using organic acid vapor for wafer bonding |
المؤلفون: |
Hanahara, S., Toyoda, N. |
المصدر: |
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2021 7th International Workshop on. :7-7 Oct, 2021 |
Relation: |
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) |
قاعدة البيانات: |
IEEE Xplore Digital Library |