مؤتمر
Surface preparation of metal films by gas cluster ion beams using organic acid vapor for wafer bonding
| العنوان: | Surface preparation of metal films by gas cluster ion beams using organic acid vapor for wafer bonding |
|---|---|
| المؤلفون: | Hanahara, S., Toyoda, N. |
| المصدر: | 2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2021 7th International Workshop on. :7-7 Oct, 2021 |
| Relation: | 2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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