التفاصيل البيبلوغرافية
العنوان: |
Interfacial Analysis of Bonded SiCN Interfaces by Neutron Reflectometry |
المؤلفون: |
Fujino, M., Takahashi, K., Kikuchi, K., Ueda, T., Miyata, N., Miyazaki, T. |
المصدر: |
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2021 7th International Workshop on. :10-10 Oct, 2021 |
Relation: |
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) |
قاعدة البيانات: |
IEEE Xplore Digital Library |