مؤتمر
Interfacial Analysis of Bonded SiCN Interfaces by Neutron Reflectometry
| العنوان: | Interfacial Analysis of Bonded SiCN Interfaces by Neutron Reflectometry |
|---|---|
| المؤلفون: | Fujino, M., Takahashi, K., Kikuchi, K., Ueda, T., Miyata, N., Miyazaki, T. |
| المصدر: | 2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2021 7th International Workshop on. :10-10 Oct, 2021 |
| Relation: | 2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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