مؤتمر
Dose monitoring in MeV energy hydrogen implanted silicon by photo-modulated reflectance measurements
| العنوان: | Dose monitoring in MeV energy hydrogen implanted silicon by photo-modulated reflectance measurements |
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| المؤلفون: | Szivos, J., Balogh, L., Rajta, I., Nagy, G., Samu, V., Takefumi, K., Zolnai, Z. |
| المصدر: | 2021 20th International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2021 20th International Workshop on. :1-3 Jun, 2021 |
| Relation: | 2021 20th International Workshop on Junction Technology (IWJT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9784863487796 |
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| DOI: | 10.23919/IWJT52818.2021.9609394 |