Impact of Nanosecond Laser Annealing on the Formation of Titanium Silicides

التفاصيل البيبلوغرافية
العنوان: Impact of Nanosecond Laser Annealing on the Formation of Titanium Silicides
المؤلفون: Esposito, Laura, Kerdiles, Sebastien, Gregoire, Magali, Mangelinck, Dominique
المصدر: 2021 20th International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2021 20th International Workshop on. :1-6 Jun, 2021
Relation: 2021 20th International Workshop on Junction Technology (IWJT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784863487796
DOI:10.23919/IWJT52818.2021.9609410