دورية أكاديمية
Thin tunnel oxide grown on silicon substrate pretreated by CF4 plasma
| العنوان: | Thin tunnel oxide grown on silicon substrate pretreated by CF4 plasma |
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| المؤلفون: | Jam Wem Lee, Tan Fu Lei, Chung-Len Lee |
| المصدر: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 22(11):513-515 Nov, 2001 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 07413106 15580563 |
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| DOI: | 10.1109/55.962647 |