مؤتمر
Development of the h-BN manufacturing process for 3D-LSI
| العنوان: | Development of the h-BN manufacturing process for 3D-LSI |
|---|---|
| المؤلفون: | Yokoi, Masashi, Shinkai, Satoko, Matsumoto, Satoshi |
| المصدر: | 2021 IEEE CPMT Symposium Japan (ICSJ) CPMT Symposium Japan (ICSJ), 2021 IEEE. :120-121 Nov, 2021 |
| Relation: | 2021 IEEE CPMT Symposium Japan (ICSJ) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781665440790 |
|---|---|
| تدمد: | 24758418 |
| DOI: | 10.1109/ICSJ52620.2021.9648854 |