مؤتمر
Development of the h-BN manufacturing process for 3D-LSI
العنوان: | Development of the h-BN manufacturing process for 3D-LSI |
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المؤلفون: | Yokoi, Masashi, Shinkai, Satoko, Matsumoto, Satoshi |
المصدر: | 2021 IEEE CPMT Symposium Japan (ICSJ) CPMT Symposium Japan (ICSJ), 2021 IEEE. :120-121 Nov, 2021 |
Relation: | 2021 IEEE CPMT Symposium Japan (ICSJ) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781665440790 |
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تدمد: | 24758418 |
DOI: | 10.1109/ICSJ52620.2021.9648854 |