Peculiarities of Phase Composition and Porosity Determination of Multilayer Porous Silicon Structures by X-ray Methods

التفاصيل البيبلوغرافية
العنوان: Peculiarities of Phase Composition and Porosity Determination of Multilayer Porous Silicon Structures by X-ray Methods
المؤلفون: Lenshin, Alexander, Peshkov, Yaroslav, Velichko, Kirill, Kannykin, Sergey
المصدر: 2021 International Conference on Information Technology and Nanotechnology (ITNT) Information Technology and Nanotechnology (ITNT), 2021 International Conference on. :1-4 Sep, 2021
Relation: 2021 International Conference on Information Technology and Nanotechnology (ITNT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665432177
DOI:10.1109/ITNT52450.2021.9649173