مؤتمر
0.69 nm resolution ultrasonic motor for large stroke precision stage
| العنوان: | 0.69 nm resolution ultrasonic motor for large stroke precision stage |
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| المؤلفون: | Egashira, Y., Kosaka, K., Takada, S., Iwabuchi, T., Baba, T., Moriyama, S., Harada, T., Nagamoto, K., Nakada, A., Kubota, H., Ohmi, T. |
| المصدر: | Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516) Nanotechnology Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on. :397-402 2001 |
| Relation: | Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780372158 9780780372153 |
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| DOI: | 10.1109/NANO.2001.966455 |