التفاصيل البيبلوغرافية
| العنوان: |
Using Feedforward in on-Product Overlay Run-to-Run Control Loop for Reducing Lot-to-Lot Variation for a MEOL Layer of an Advanced Logic Node |
| المؤلفون: |
Yang, Xiaosong, Zhang, Hai, Huang, Dekun, Wu, Yimin, Gu, Yifan, Bao, Junyi, Gong, Xue, Jiang, Lei, Wu, Jiaqi, Janbahan, Aliasghar Keyvani, Li, Jun, Zhao, Yiping, Li, Hua |
| المصدر: |
2021 International Workshop on Advanced Patterning Solutions (IWAPS) Advanced Patterning Solutions (IWAPS), 2021 International Workshop on. :1-4 Dec, 2021 |
| Relation: |
2021 International Workshop on Advanced Patterning Solutions (IWAPS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
