دورية أكاديمية
Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches
| العنوان: | Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches |
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| المؤلفون: | Ma, B., Firouzi, K., Khuri-Yakub, B.T. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 31(3):393-401 Jun, 2022 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2022.3152943 |