التفاصيل البيبلوغرافية
العنوان: |
Enhanced wafer level variability improvement by customized wafer dose patterning by shot in DRAM |
المؤلفون: |
Mu, Kejun, Wang, Chuyu, Zhang, Zhongjie, Tang, Jifeng, Yang, Andy, Li, Xiong, Wang, Jianping, Wu, Blacksmith, Cao, Kanyu |
المصدر: |
2021 2nd International Conference on Electronics, Communications and Information Technology (CECIT) CECIT Electronics, Communications and Information Technology (CECIT), 2021 2nd International Conference on. :555-559 Dec, 2021 |
Relation: |
2021 2nd International Conference on Electronics, Communications and Information Technology (CECIT) |
قاعدة البيانات: |
IEEE Xplore Digital Library |