مؤتمر
High-k MIM dielectric reliability study in 65nm node
العنوان: | High-k MIM dielectric reliability study in 65nm node |
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المؤلفون: | Achanta, Ravi, McGahay, V., Boffoli, S., Kothandaraman, C., Gambino, J. |
المصدر: | 2022 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2022 IEEE International. :P32-1-P32-4 Mar, 2022 |
Relation: | 2022 IEEE International Reliability Physics Symposium (IRPS) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781665479509 |
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تدمد: | 19381891 |
DOI: | 10.1109/IRPS48227.2022.9764589 |