التفاصيل البيبلوغرافية
العنوان: |
Study of Plasma Ash Rate Enhancement by Machine Learning Models for TAT Improvement |
المؤلفون: |
Jheng, Shao-Lou, Wu, Jyunhong, Yang, Zusing, Chiu, Yuan-Chieh, Wu, Ming-Tsung, Lee, Hong-Ji, Lian, Nan-Tzu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-Yuan |
المصدر: |
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2021 32nd Annual SEMI. :1-4 May, 2021 |
Relation: |
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
قاعدة البيانات: |
IEEE Xplore Digital Library |