High-K incorporated in a SiON tunnel layer for 3D NAND programming voltage reduction

التفاصيل البيبلوغرافية
العنوان: High-K incorporated in a SiON tunnel layer for 3D NAND programming voltage reduction
المؤلفون: Breuil, L., Nyns, L., Rachidi, S., Banerjee, K., Arreghini, A., Bastos, J., Ramesh, S., Van den bosch, G., Rosmeulen, M.
المصدر: 2022 IEEE International Memory Workshop (IMW) Memory Workshop (IMW), 2022 IEEE International. :1-4 May, 2022
Relation: 2022 IEEE International Memory Workshop (IMW)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665499477
تدمد:25737503
DOI:10.1109/IMW52921.2022.9779307