التفاصيل البيبلوغرافية
| العنوان: |
BEOL Integrated Ferroelectric HfO2 based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions |
| المؤلفون: |
Alcala, R., Materano, M., Lomenzo, P.D., Grenouillet, L., Francois, T., Coignus, J., Vaxelaire, N., Carabasse, C., Chevalliez, S., Andrieu, F., Mikolajick, T., Schroeder, U. |
| المصدر: |
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2022 6th IEEE. :67-69 Mar, 2022 |
| Relation: |
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
