Experimental Investigation of Moisture Induced Offset Drifts on Plastic Packaged MEMS Sensor Devices

التفاصيل البيبلوغرافية
العنوان:	Experimental Investigation of Moisture Induced Offset Drifts on Plastic Packaged MEMS Sensor Devices
المؤلفون:	Jurgschat, C., Scheben, R., Toth, I., Ohms, T., Kohn, O., Zimmermann, A.
المصدر:	Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 31(4):653-663 Aug, 2022
قاعدة البيانات:	IEEE Xplore Digital Library

الوصف
تدمد:	10577157 19410158
DOI:	10.1109/JMEMS.2022.3177165