Self-assembled epitaxial CoSi/sub 2//Si[100] nanostructures

التفاصيل البيبلوغرافية
العنوان: Self-assembled epitaxial CoSi/sub 2//Si[100] nanostructures
المؤلفون: Kluth, P., Zhao, Q.-T., Winnerl, S., Lenk, S., Mantl, S.
المصدر: 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) Solid-state and integrated circuit technology Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on. 1:483-485 vol.1 2001
Relation: Proceedings of 6th International Conference on Solid-State and IC Technology
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780365208
9780780365209
DOI:10.1109/ICSICT.2001.981523