مؤتمر
Influences of various dielectrics materials on p++ silicon diaphragm
العنوان: | Influences of various dielectrics materials on p++ silicon diaphragm |
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المؤلفون: | Junmiao Wu, Deshu Zou, Guo Gao, Lan Li, Nanhui Niu, Guangdi Shen |
المصدر: | 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) Solid-state and integrated circuit technology Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on. 2:823-826 vol.2 2001 |
Relation: | Proceedings of 6th International Conference on Solid-State and IC Technology |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780365208 9780780365209 |
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DOI: | 10.1109/ICSICT.2001.982022 |