Influences of various dielectrics materials on p++ silicon diaphragm

التفاصيل البيبلوغرافية
العنوان: Influences of various dielectrics materials on p++ silicon diaphragm
المؤلفون: Junmiao Wu, Deshu Zou, Guo Gao, Lan Li, Nanhui Niu, Guangdi Shen
المصدر: 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) Solid-state and integrated circuit technology Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on. 2:823-826 vol.2 2001
Relation: Proceedings of 6th International Conference on Solid-State and IC Technology
قاعدة البيانات: IEEE Xplore Digital Library